LuCID Dryer Process Optimization
The project concentrates on MEMS (Micro-Electro-Mechanical Systems) fabrication process optimization. MEMS devices comprise suspended structures, such as cantilevers, gyros, membranes, etc., which are created by removing sacrificial material around them in order to have these structures released to perform their designated function. Currently, these structures are being released with the use of either dry etch or chemical vapor techniques. Wet chemistry release of suspended structures is favorable: minimized costs, parallel process and most importantly reduced impact on the environment. Challenge in achieving successful release using wet chemistry is the stiction of these structures to substrate or other parts of the device drying step at the end of wet chemistry process. State of the art equipment located in C2MI facility allows use of wet chemistry process followed by chemical drying in order to prevent stiction of these structures. Hence, design and optimization of this dry sequence will minimize significantly MEMS devices manufacturing costs and environmental hazards.