Mathematical Analysis of Partial Differential Equations Modeling Electrostatic MEMS
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), which combine electronics with miniature-size mechanical devices, are essential components of the modern technology. In order to provide accurate, controlled, and stable locomotion for such microdevices, researchers have proposed a variety of models, based upon thermal, biological, or electrostatic forces. There are many industries and manufacturers in Ontario who rely on MEMS technology in a crucial way. Our objective is to use mathematical analysis to predict various phenomena related to some of these models. Our analysis will help MEMS industry to understand which material parameters are most crucial to tune in order to achieve a desired effect. This can prevent manufacturers from expensive experiments and contribute to the practical needs of the modem technology.