Multivariate Analysis for Manufacturing Excursion Detection with Complex Equipment Containing Sub-Systems
Triant Technologies provides the ModelWare Fault Detection software product to monitor sensor data collected from advanced manufacturing tools such as those used for semiconductor and flat panel display manufacturing. ModelWare Fault Detection software performs a range of analyses, including online, multivariate data analysis using a proprietary algorithm and implementation. The goal for this project is to improve the performance of the multivariate analysis methods when used with complex manufacturing equipment. Specifically, the targeted challenge is to improve analysis performance where a manufacturing unit contains multiple independent internal sub-systems.