Thermally Compensated Fabry-Perot MEMS Pressure Sensor

Pressure sensing during plastic injection molding is critical to the quality of manufactured consumer and commercial goods and need to be able to operate up to temperatures of 350°C and pressures up to 10,000 psi. In this case, pressure is measured using a membrane to infer displacement and depending on the conditions, the membrane may be directly exposed to the load. In the majority of cases, pressure transfer fluids such as mercury, are used to protect the sensor from the high temperature of the plastic melt and to facilitate remote sensing. However, the use of these fluids reduces the accuracy of the sensor and mercury is restricted in Canada and many other countries. In the proposed project, the intern will develop a first-generation of thermally compensated fiber-optic Micro Electro Mechanical Systems (MEMS) Fabry-Perot pressure sensors that can operate at temperatures up to 200°C and 1000 psi, using packaging technologies...

Sepideh Gaderian
Faculty Supervisor: 
Patricia Nieva
Partner University: