Structural health monitoring (SHM) of airplanes requires very compact and low-power stain sensors. Therefore, IPR wants to investigate how a commercial micro-fabrication process can be used to implement its MEMS sensor design, particularly using the electro-conductive properties of doped silicon vs. metal-coated crystalline silicon or polysilicon. The project will consist of a conceptual study of the current design provided by IPR and the design and evaluation through simulations of that design implemented in different technology.
