The project concentrates on MEMS (Micro-Electro-Mechanical Systems) fabrication process optimization. MEMS devices comprise suspended structures, such as cantilevers, gyros, membranes, etc., which are created by removing sacrificial material around them in order to have these structures released to perform their designated function. Currently, these structures are being released with the use of either dry etch or chemical vapor techniques. Wet chemistry release of suspended structures is favorable: minimized costs, parallel process and most importantly reduced impact on the environment.