Process optimization and Spectroscopic Analysis of Diamond-Like Carbon Films

Diamond like carbon (DLC) is an amorphous form of carbon with a high fraction of diamondlike
(sp3) bonds. DLC thin films have many attractive attributes including extraordinary
hardness, enhanced lubrication and wear resistance properties. Aurora Scientific Corp. is the
provider of advanced vacuum coating systems based on its patented physical vapor
deposition (PVD) technology. Aurora is seeking to improve their DLC thin film deposition
technology by optimizing the conditions required to deposit high quality DLC coatings. We
propose to assist Aurora in this development by monitoring the film characteristics during
growth through in situ Raman spectroscopic analysis and optical emission spectroscopy and
to correlate the thin film deposition conditions with desirable physical properties. The
information gathered will help Aurora to implement an integrated OES/Raman process
controller system into its commercial PVD vacuum coating systems.

Faculty Supervisor:

Gary Leach

Student:

Partner:

Aurora Scientific Corp

Discipline:

Physics

Sector:

Professional, scientific and technical services

University:

Simon Fraser University

Program: