Multiscale Thermomechanical Analysis of Phase Change Phenomena in Polymer-Based Solvents

This project aims to improve how polymer-based solvents are modeled during freezing and solidification processes that are critical to modern semiconductor manufacturing. Building on prior experimental and theoretical studies (i.e., the collaborative work from participated institutions), the project will develop an accurate and reliable computational framework that captures how heat transfer and mechanical stresses interact across multiple length scales, from the device level down to micro- and meso-scales. The project will help explain how phase changes in solvents affect surface quality, structural stability, and reliability of nanoscale semiconductor devices by strengthening and integrating advanced numerical modeling capabilities. The expected benefits include enhanced predictive tools for semiconductor fabrication, improved alignment between experiments and simulations, and stronger research collaboration and technical expertise at the participating institutions, particularly by expanding simulation-based evaluation capabilities at the University of Toronto and advancing complementary computational mechanics expertise at the Kyoto Institute of Technology.

Faculty Supervisor:

Minghan Xu

Student:

Partner:

Kyoto Institute of Technology

Discipline:

Engineering

Sector:

Energy and Utilities; Technology; Nanotechnology

University:

University of Toronto

Program: