Process optimization andS pectroscopic Analysis of Diamond–?Like Carbon Films

Diamond like carbon (DLC) is an amorphous form of carbon with a high fraction of diamond-like (sp3) bonds. DLC thin films have many attractive attributes including extraordinary hardness, enhanced lubrication and wear resistance properties. Aurora Scientific Corp. is the provider of advanced vacuum coating systems based on its patented physical vapor deposition (PVD) technology. Aurora is seeking to improve their DLC thin film deposition technology by optimizing the conditions required to deposit high quality DLC coatings. We propose to assist Aurora in this development by monitoring the film characteristics during growth through in situ Raman spectroscopic analysis and optical emission spectroscopy and to correlate the thin film deposition conditions with desirable physical properties. The information gathered will help Aurora to implement an integrated OES/Raman process controller system into its commercial PVD vacuum coating systems.

Faculty Supervisor:

Gary Leach

Student:

Partner:

Aurora Scientific Corp

Discipline:

Physics

Sector:

Professional, scientific and technical services

University:

Simon Fraser University

Program: