Feasibility Study for X-Ray Lithographic Fabrication of Diffractive X-Ray Optical Elements

The University of Saskatchewan (Dr. S. Achenbach), intern Danyil Dmytriiev, and the Oles Honchar Dnipro National University in Ukraine (Dr. Mykhailo Derhachov)/Ministry of Education and Science of Ukraine, engage in a MITACS-funded research project to innovate microfabrication processes for diffractive X-ray optics. Fresnel Zone Plates (FZPs) are miniaturized focusing and beam shaping elements with nanometer scale dimensions. Such plates are required in, e.g., spectromicroscopy using soft X-ray synchrotron radiation to advance basic and applied sciences, e.g. environmental and life sciences and material development. FZPs have typical overall dimensions between fingernail-size and the diameter of a human hair, with nanometer scale details, at costs comparable to a compact vehicle for a single FZP. Using X-ray lithography available at SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, Saskatoon, the research partnership aims at developing fabrication technologies for zone plates that allow for much reduced costs and increased availability. Both would enable more widespread use in academic and industrial research. Successful completion will much elevate Canada’s visibility and the university’s reputation in X-ray optics, serve Canadian companies, and foster international collaboration and student exchange with one of the leading research-intensive universities in the Ukraine.

Faculty Supervisor:

Sven Achenbach

Student:

Partner:

Oles Honchar Dnipro National University

Discipline:

Engineering

Sector:

Education

University:

University of Saskatchewan

Program: