Process Development of Volatile Cobalt ALD Precursors

Cobalt thin-films have found widespread applications in microelectronics devices; such as liners in copper interconnects, wetting layers, and caps, in addition to applications for magnetic devices and CoSi2 contacts. CVD and ALD techniques are typically used to achieve cobalt films between 2-5 nm thick with excellent conformalities and negligible resistance increase. Leading precursors for cobalt […]

Read More
Proof of Principle Application for Biosensors in Animal Models

NXTSens has developed an implantable continuous monitoring, stand-alone and potentially mass-producible microsensor for accurate monitoring of tissue pressure and temperature in damaged limb muscles to better diagnose ACS. The proposed research will involve several sub-projects that include: i) develop appropriate surgical models for the accurate and reproducible placement of the microsensors in rodent compartments; ii) […]

Read More