Development of fabrication process for AFM probes

Atomic Force Microscopy (AFM) is one of the most widely used imaging tools by the researchers and industries
to view and characterize tiny objects. This tool uses a very tiny and sharp probe to scan or feel the surface of the
specimens and then it produces a topography image of the scanned surfaces. This research project aims to
develop the cleanroom fabrication process for “soft” probes with low force constant as needed for biological
imaging, durable probes with long lifetime using diamond as the tip material, and high aspect ratio silicon tips for
accurately imaging deep trenches or tall structures.

Faculty Supervisor:

Bo Cui;Guoxing Miao;Dayan Ban

Student:

Partner:

Nanodevice Solutions Inc.

Discipline:

Engineering

Sector:

Professional, scientific and technical services

University:

University of Waterloo

Program: