Characterizing mixed dielectrics for hard, low adhesion coatings

Surface coatings find widespread uses in everything from eyeglasses to machine tools. For electrical sensor devices, including devices for cancer screening and for toxic gas sensing, it’s especially important to have coatings that are hard and durable and adhere well to gold electrodes, but are not sticky to organic molecules. Currently-used materials have several useful […]

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Development of high precision microelectromechanical systems (MEMS) based vacuum encapsulated resonators

Rapid development of micro-fabrication technology, once considered exclusively for aerospace navigation, is now regarded for a wide range of applications, including autonomous vehicle navigation, underwater and industrial applications. Microelectromechanical systems (MEMS)-based gyroscope employs a resonating mass (resonator) to detect changes in motion, which is the central element of the gyroscope. MEMS resonator energy loss is […]

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