Design and development of techniques to characterize optical, mechanical and chemical properties of metallic and semiconductor thin films with applications in MEMS structures and their packaging

Micro-Electro-Mechanical Systems (MEMS) are complex systems with sizes in the range of few microns (human hair has thickness of 150-200 microns) which have both mechanical and electronic components. MEMS technology has entered in many industries such as optical technology, point of care diagnostics, telecommunications, automotive, and military. Today, there are hundreds of MEMS devices, e.g. […]

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