The recycling of industrial chemicals has become very important to industry not only because of the potential for decreases in costs and increases in efficiency, but also the reduction of environmental impact. Many industrial chemical wastes however, are quite difficult to separate into high purity materials so that they may be recycled. The implementation […]

Copper is an important metal for microelectronics: it acts as interconnects (i.e., the wiring) between the devices in the microchip. As microchips get smaller, it is more difficult to make this wiring by traditional methods. Thus, a new technology (atomic layer deposition, ALD) is positioned to enable the deposition of copper when interconnects need to […]